EC 465 MEMS : Module 2

    

Prepared By

Mr. Manu Prasad

Asst. Professor

AWH Engineering College

Course objectives:

 To understand the operation of major classes of MEMS devices/systems

 To grasp the fundamentals of standard micro fabrication techniques and processes

 To understand the unique demands , environments and applications of MEMS devices

 To create interest for further study in this area 

Text Books:

 Tai Ran Hsu, MEMS and Microsystems Design and Manufacture, TMH, 2002

 Chang Liu, Foundations of MEMS, Pearson 2012

Syllabus

Flexural beams: Types of Beams, longitudinal strain under pure bending – Deflection of beams – Spring constant of cantilever – Intrinsic stresses Actuation and Sensing techniques : Thermal sensors and actuators, Electrostatic sensors and actuators , Piezoelectric sensors and actuators, magnetic actuators

Module 2 - Note PPT - click here 

Other notes (notes prepared by other teachers)

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