Course objectives:
To understand the operation of major classes of MEMS devices/systems
To grasp the fundamentals of standard micro fabrication techniques and processes
To understand the unique demands , environments and applications of MEMS devices
To create interest for further study in this area
Text Books:
Tai Ran Hsu, MEMS and Microsystems Design and Manufacture, TMH, 2002
Chang Liu, Foundations of MEMS, Pearson 2012
Syllabus
MEMS and Microsystems: Applications – Multidisciplinary nature of MEMS – principles and examples of Micro sensors and micro actuators – micro accelerometer –comb drives - Micro grippers –micro motors, micro valves, micro pumps , Shape Memory Alloys. Review of Mechanical concepts: Stress, Strain, Modulus of Elasticity, yield strength, ultimate strength – General stress strain relations – compliance matrix. Overview of commonly used mechanical structures in MEMS - Beams, Cantilevers, Plates, Diaphragms – Typical applications
Module 1 - Note - click here
MEMS intro video explanation -
**video from YouTube
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