EC 465 MEMS : Module 4

Prepared By:

Mr. Manu Prasad

Asst. Professor

AWH Engineering College

Course objectives:

 To understand the operation of major classes of MEMS devices/systems

 To grasp the fundamentals of standard micro fabrication techniques and processes

 To understand the unique demands , environments and applications of MEMS devices

 To create interest for further study in this area 

Text Books:

 Tai Ran Hsu, MEMS and Microsystems Design and Manufacture, TMH, 2002

 Chang Liu, Foundations of MEMS, Pearson 2012

Syllabus

Materials for MEMS – Silicon – Silicon compounds – Silicon Nitride, Silicon Dioxide, Silicon carbide, Poly Silicon, GaAs , Silicon Piezo resistors, Polymers in MEMS – SU-8, PMMA, PDMS, Langmuir – Blodgett Films, Micro System fabrication – Photolithography – Ion implantation- Diffusion – Oxidation – Chemicalvapour deposition – Etching

Module 4 - Note  Part 1 - click here

                   Note  Part 2 - click here