Prepared By:
Mr. Manu Prasad
Asst. Professor
AWH Engineering College
Course objectives:
To understand the operation of major classes of MEMS devices/systems
To grasp the fundamentals of standard micro fabrication techniques and processes
To understand the unique demands , environments and applications of MEMS devices
To create interest for further study in this area
Text Books:
Tai Ran Hsu, MEMS and Microsystems Design and Manufacture, TMH, 2002
Chang Liu, Foundations of MEMS, Pearson 2012
Syllabus
Scaling laws in miniaturization - scaling in geometry, scaling in rigid body dynamics, Trimmer force scaling vector, scaling in electrostatic and electromagnetic forces, scaling in electricity and fluidic dynamics, scaling in heat conducting and heat convection.
Module 3 - Note - click here
Notes prepared by other teachers
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